王晓红,清华大学集成电路学院长聘教授,博士生导师。1998年毕业于清华大学精密仪器与机械学系,获工学博士学位,分别于1991和1985年在东南大学获工学硕士和学士学位。美国斯坦福大学机械系访问学者(2005年11月-2006年11月),美国加州大学UCLA电子工程系副研究员(2006年11月-2007年3月),瑞士联邦理工(ETH Zurich)客座教授(2019年3月-2019年7月)。
长期从事MEMS器件与系统集成研究,尤其是微能源(Power MEMS)的研究,在国际同行有较高影响力。先后主持自然科学基金重点项目2项,国际 (地区) 合作项目1项,面上项目3项,国家科技部863项目2项,973课题2项等等。在国内外学术期刊及会议上发表论文上百篇(如,Adv. Energy Mater., Nano Energy, ACS Nano, IEDM等),申请及授权国家及国际发明专利30多项。
现为IEEE高级会员,担任MEMS领域多个重要国际会议TPC/ETPC成员,如,IEDM,Transducers IEEE MEMS等,曾担任IEEEMEMS2016大会主席,及IEEE MEMS2017大会的国际指导委员会主席。作为大会主席,将在中国苏州主持举办PowerMEMS 2021国际会议。目前是微电子领域重要国际刊物IEEE/ASME Journal of Microelectromechanical Systems 和PNG Microsystems & Nanoengineering的副主编,Journal of Micromechanics and Microengineering杂志编辑顾问委员会委员。
Prof. Wang received her Ph.D. from Tsinghua University in Mechanical Engineering. As a visiting researcher, she researched micro SOFC at Stanford University from Nov. 2005 to Oct. 2006. She also had several months of research experience at HKUST and UCLA in 2001 and 2007, respectively, and was a guest professor in 2019 at ETH Zürich, Switzerland.
Her research focuses on MEMS design and integration technologies, particularly Power-MEMS, like micro supercapacitors, silicon-based micro batteries, energy harvestings, micro fuel cells, etc. She has authored or co-authored more than 100 papers (including Adv. Energy Mater., Nano Energy, ACS Nano, IEDM), and filed more than 40 patents. She was the General Co-Chair of IEEE-MEMS 2016 held in Shanghai, and has served several international conferences as TPC/ETPC member, like IEEE-IEDM, IEEE-MEMS, Transducers, PowerMEMS, etc. In addition, she is/was an Associate Editor of IEEE/ASME JMEMS, PNG Microsystems & Nanoengineering, and an Executive Editorial Board member of IOP JMM. And also she is a member of the IEEE Teaching Awards Committee.
Representative journal articles:
[1] Z, Li, Xiaohong Wang, et al. CMOS-Compatible Titanium-Based Micro Supercapacitor With Outstanding Capacitance and Frequency Performances. IEEE Electron Device Letters, 2023, 44(7), pp. 1224-1227.
[2] Feng, H., Xiaohong Wang, et al. Multimodal MEMS vibration energy harvester with cascaded flexible and silicon beams for ultralow frequency response. Microsystems & Nanoengineering, 2023, 9, 33.
[3] S, Xu, Xiaohong Wang, et al. Wafer-Scale Fabrication and Encapsulation of Micro Supercapacitor. IEEE Electron Device Letters, 2022, 43(3), pp. 474-477.
[4] F, Xia, Xiaohong Wang, et al. On-Chip High-Power Supply Unit: Micro Supercapacitor With Superb Capacitance Density and Fast Charge/Discharge Ability. IEEE Electron Device Letters, 2021, 42(4), pp. 625-628.
[5] Hu B, Xiaohong Wang. Advances in micro lithium-ion batteries for on-chip and wearable applications. Journal of Micromechanics and Microengineering, 2021, 31(11): 114002.
[6] Bu L, Xiaohong Wang, et al. Impact induced compound method for triboelectric-piezoelectric hybrid nanogenerators to achieve Watt level average power in low frequency rotations. Nano Energy, 2020, 70: 104500.
[7] Bu, L, Xiaohong Wang, et al. On-site traversal fractional open circuit voltage with uninterrupted output power for maximal power point tracking of photovoltaic systems. Electronics, 2020, 9(11): 1802.
[8] Xu, S., Xiaohong Wang, et al. Theoretical investigation of air breakdown direct current triboelectric nanogenerator. Applied Physics Letters, 2020, 116(26), p.263901.
[9] Xu, S., Xiaohong Wang, et al. Self-doubled-rectification of triboelectric nanogenerator. Nano Energy, 2019, 66, p.104165.
[10] Xu, Sixing, Xiaohong Wang, et al. Boost the performance of triboelectric nanogenerators through circuit oscillation. Advanced Energy Materials 2019, 9, no. 30: 1900772.
[11] Jia, X. and Xiaohong Wang. Mosaic-Like Micropatterned Monolayer RGO/AgNPs Film Gas Sensor with Enhanced Room-Temperature NO2 Response/Recovery Properties. Journal of Microelectromechanical Systems 2019, 28(5), pp.833-840.
[12] Hu, B., Xiaohong Wang, et al. A Novel Anode with Superior Cycling Stability Based on Silicon Encapsulated in Shell‐Like rGO/CNT Architecture for Lithium‐Ion Batteries. Energy Technology, 2019, 7(5), p.1801047.
[13] Xu, S., Xiaohong Wang, et al. Circuit-integratable high-frequency micro supercapacitors with filter/oscillator demonstrations. Nano Energy, 2019, 58, pp.803-810.
[14] Wang, M., Xiaohong Wang, et al. Effects of grafting parameters on the properties of proton exchange membranes based on sulfo-functionalized porous silicon for micro direct methanol fuel cells. Journal of Polymer Engineering, 2019, 39(7), pp.620-627.
[15] Pu, J., Xiaohong Wang, et al. Highly flexible, foldable, and rollable microsupercapacitors on an ultrathin polyimide substrate with high power density. Microsystems & Nanoengineering, 2018, 4(1), pp.1-11.
[16] Kuang, X., Xiaohong Wang, et al. Silicon Nanoparticles Within the Carbonized SU-8 Cages as A Micro Lithium-Ion Battery Anode. Journal of Microelectromechanical Systems, 2018, 27(2), pp.201-209.
[17] Wang, M., Xiaohong Wang, et al. A novel proton exchange membrane based on sulfo functionalized porous silicon for monolithic integrated micro direct methanol fuel cells. Sensors and Actuators B: Chemical, 2018, 253, pp.621-629.
[18] Shen, C., Xiaohong Wang, et al. A review of on-chip micro supercapacitors for integrated self-powering systems. Journal of Microelectromechanical Systems, 2017, 26(5), pp.949-965.
[19] Wu, Z., Xiaohong Wang, et al. A flexible foldable tubular μDMFC for powering wearable devices. Journal of Microelectromechanical Systems, 2017, 26(5), pp.1147-1154.
[20] Liu, X., Xiaohong Wang, et al. Polymeric nanofibers with ultrahigh piezoelectricity via self-orientation of nanocrystals. ACS nano, 2017, 11(2), pp.1901-1910.
[21] Liu, X., Xiaohong Wang, et al. High-sensitivity piezoresponse force microscopy studies of single polyvinylidene fluoride nanofibers. Materials Letters, 2017, 191, pp.189-192.
[22] Liu, X., Xiaohong Wang, et al. Nanoscale domain imaging and local piezoelectric coefficient d33 studies of single piezoelectric polymeric nanofibers. Materials Letters, 2017, 189, pp.66-69.
[23] Liu, X., Xiaohong Wang, et al. 3D cardiac cell culture on nanofiber bundle substrates for the investigation of cell morphology and contraction. Micromachines, 2017, 8(5), p.147.
[24] Liu X, Xiaohong Wang, et al. Polymeric Nanofibers with Ultrahigh Piezoelectricity via Self-Orientation of Nanocrystals. ACS nano, 2017. 11(2),1901-1910
[25] J. Pu, Xiaohong Wang, et al., Highly Stretchable Microsupercapacitor Arrays with Honeycomb Structures for Integrated Wearable Electronic Systems, ACS nano, 2016. 10(10):9306-9315.
[26] Xia Liu, Xiaohong Wang, et al., In vitro cardiomyocytes-driven biogenerator based on aligned piezoelectric nanofibers, Nanoscale, 2016, 8, 7278-7286.
[27] Juan Pu, Xiaohong Wang, et al., High-energy-density, all-solid-state micro supercapacitors with three-dimensional interdigital electrodes of carbon/polymer electrolyte composite, Nanotechnology, 27, 045701 (2016).
[28] X. Liu, Xiaohong Wang, et al., Nanoscale investigations on β-phase orientation, piezoelectric response, and polarization direction of electrospun PVDF nanofibers. RSC Advances, 2016. 6(110): 109061-109066.
[29] X. Liu, Xiaohong Wang, et al., Ultra-long MWCNTs highly oriented in electrospun PVDF/MWCNT composite nanofibers with enhanced β phase. RSC Advances, 2016. 6(108): 106690-106696.
[30] X. Liu, Xiaohong Wang, et al., Nanoscale domain imaging and local piezoelectric coefficient d 33 studies of single piezoelectric polymeric nanofibers. Materials Letters, 189 (2017): 66-69
[31] X. Liu, Xiaohong Wang, et al., High-sensitivity piezoresponse force microscopy studies of single polyvinylidene fluoride nanofibers. Materials Letters, 2017, 191:189-192
[32] Xia Liu, Xiaohong Wang, et al., A Flexible, All-Solid-State Micro Supercapacitor and Its Application in Electrostatic Energy Management System, Journal of Microelectromechanical Systems, 2016, 10.1109/JMEMS.2016.2589929.
[33] Chen Zhou, Xiaohong Wang, et al., High performance flexible ultraviolet photodetectors based on TiO2/Graphene hybrid for irradiation monitoring applications, J.Micromech. Microeng, 2016, pp. 75003-75011(9).
[34] Siwei Li, Xiaohong Wang, et al., Micro Li-ion capacitor with activated carbon/graphite configuration for energy storage, Journal of Power Sources, 282 (2015), 394-400.
[35] Zonglin Wu, Xiaohong Wang, et al., A passive vapor-feed direct methanol fuel cell based on a composite pervaporation membrane, Journal of Microelectromechanical Systems, 24(1), 207-215.
[36] Zonglin Wu, Xiaohong Wang, et al., A long-term stable power supply uDMFC stack for wireless sensor node applications, J. Micromech. Microeng. 24(10), 104004.
[37] Fei Teng, Xiaohong Wang, et al., A micro glucose sensor based on direct prototyping mesoporous carbon electrode, Microsyst Technol, 21(6), 1337-1343.
[38] LU Y, WANG X, WU X, et al. A non-resonant, gravity-induced micro triboelectric harvester to collect kinetic energy in low-frequency jigging movements of human limbs, J. Micromech. Microeng. 24 (2014) 065010.
[39] Xiaohong Wang, Yan’an Zhou, Litian Liu, Capillary-based water removal cathode for an air-breathing micro direct methanol fuel cell, Microsyst Technol, (2014) 20:1093–1101.
[40] Xia Liu, Xiaohong Wang, Xiaoming Wu, Zhixiong Zhang, Yuanxi Zhang, The synergistic effect of periodic immunomagnetics and microfluidics on universally capturing circulating tumor cells, Microsyst Technol, (2014) 20:1337–1344.
[41] Mei Wang, Xiaohong Wang, Jiannan Li, Litian Liu, In-Situ Synthesis of 3D Platinum Nanoflowers on Porous Silicon for Monolithic Integrated Micro Direct Methanol Fuel Cells, J. Mater. Chem. A, 2013,1, P8127-8133.
[42] C.W. Shen, X. H. Wang, S. W. Li, J. G. Wang, W.F. Zhang, F.Y. Kang, A high-energy-density micro supercapacitor of asymmetric MnO2-carbon configuration by using micro-fabrication technologies, Journal of Power Sources, 234 (2013) 302-309.
[43] Shen C, Wang X, Zhang W, Kang F, Direct prototyping of patterned nanoporous carbon: a route from materials to on-chip devices, Scientific Reports, 3(2013), 2294.
[44] Ling Bu, Xiaoming Wu, Xiaohong Wang, Litian Liu, Liquid encapsulated electrostatic energy harvester for low-frequency vibrations, Journal of Intelligent Material Systems and Structures, 2013, 24(1), pp. 61-69.
[45] Siwei Li, Xiaohong Wang, Hexin Xing and Caiwei Shen, Micro supercapacitors based on a 3D structure with symmetric graphene or activated carbon electrodes, J. Micromech. Microeng. 23 (2013) 114013.
[46] Ling Bu, Xiaoming Wu, Xiaohong Wang, Litian Liu, Silicon based polytetrafluoroethylene electrets: preparation and corona charging characteristics, Journal of Electrostatics, 2013, 71(4), pp. 666-672.
[47] Ling Bu, Xiaoming Wu, Xiaohong Wang, Litian Liu, “Non-resonant electrostatic energy harvester for wideband applications”, Micro & Nano Letters, 8(3), 135-137.
[48] Mei Wang, Xiaohong Wang, Sarmishtha Ghoshal, Deposition of platinum nanoparticles on p-type macroporous silicon wall, Micro & Nano Letters, 8 (8), pp. 465–469.
[49] Yan’an Zhou, Xiaohong Wang, Xun Guo, Xinping Qiu, Litian Liu , A water collecting and recycling structure for silicon-based micro direct methanol fuel cells, International Journal of Hydrogen energy, 37 (2012), 967-976.
[50] Xiaohong Wang, Yiming Zhu, Caiwei Shen, Yan’an Zhou, Xiaoming Wu, Litian Liu, A novel assembly methode using multi-layer bonding technique for micro DMFCs and their stack, Sensors and Actuators A: Physical, 188 (2012), 246-254.
[51] Xi Liuy, Xiaoming Wu, Tianling Ren, Xiaohong Wang, Thin film thermal conductivity metrology using photoluminescence of quantum dots, Sensors and Actuators A: Physical, 188 (2012), 255-260.
[52] Siwei Li, Xiaohong Wang, Caiwei Shen, Jian’gan Wang, and Feiyu Kang, Nano-structured Manganese Dioxides as Active Materials for Micro Supercapacitors, Micro & Nano Letters. 7( 8), 2012, pp. 744–748.
[53] Hexin Xing, Xiaohong Wang, et al., Fabrication and tests of a 3-D micro supercapacitor using SU-8 photoresist as the separator, Micro & Nano Letters, 7( 12), 2012, pp. 1166–1169.
[54] C.W. Shen, X. H. Wang, W.F. Zhang, F.Y. Kang, A high-performance three-dimensional micro supercapacitor based on self-supporting composite materials, Journal of Power Sources, 196(2011), 10465-10471.
[55] Q. Zhang, X. H. Wang, Y. M. Zhu, Y. A. Zhou, X. P. Qiu, L.T. Liu, Optimized Temperature Control System Integrated into a Micro Direct Methanol Fuel Cell for Extreme Environments, Journal of Power Sources, 192(2009), 494-501.
[56] X. H. Wang, Y.A. Zhou, et al., An air-breathing microdirect methanol fuel cell stack employing a single anode shared using silicon microfabrication technologies, J. Micromech. Microeng., 19 (2009) 094012.
[57] Q. Zhang, X. H. Wang, L.Y. Zhong, et al., Design, optimization and microfabrication of a micro direct methanol fuel cell with microblocks in anode structure, Sensors and Actuators A: Physical, 154 (2009), pp. 247-254.
[58] X. H. Wang, H. Huang, T. Holme X. Tian, F. B. Prinz, Thermal stabilities of nanoporous metallic electrodes at elevated temperatures, Journal of Power Sources, 175(2008), 75-81.
[59] L. Zhong, X. Wang, Y. Jiang, et al, A Micro-direct Methanol Fuel Cell Stack with Optimized Design and Microfabrication, Sensors and Actuators A: Physical, 143 (2008), 70–76.
[60] Yingqi Jiang, Xiaohong Wang, et al., Design, Fabrication, and Testing of a Silicon-based Air- breathing Micro Direct Methanol Fuel Cell, J. Micromech. Microeng., 2006, 16: s233-s239.