Undergraduate Courses

I. Introduction

The Primary Major Name of Undergraduate students at Department of Micro-Nano electronics is Electronic Science and Technology. The Secondary Major Name is Microelectronics.

II. Courses

Solid State Physics ( 30260054 ), Key Subject Course

Instructor: Wang Yan

Solid State Physics is a fundamental subject for solid materials and devices. In this subject, the fundamental properties of perfect crystal are discussed. Especially, the effect of the impurities and defects on the characteristics of materials is also introduced. Furthermore, this subject also involves learning about the vibration of the crystal lattice, energy band theory, and electron transport in crystal lattice. After learning this subject, the students should be able to:

(1) Describe the characteristics of crystal structure.

(2) Give a detailed description of the dynamics of crystal lattice.

(3) Describe the formation and characteristics of crystal defects.

(4) Develop the concept of energy bands in the nearly-free electron model and the tight-binding approximation.

( 5) Give a basic description of electron transport in metals and semiconductors.


Digital IC Analysis & Design(40260103), Key Subject Course

Instructor: Wu Xingjun

This course starts from a model of the semiconductor devices and gradually processes upwards, covering the inverter, the complex logic (NAND, NOR, XOR), the functional (adder, multiplier, shifter, register) and the system module (datapath, controller, memory) levels of abstraction. For each of these layers, the dominant design parameters are identified and simplified models are constructed, abstracting away the nonessential details. This course is divided into two major parts: Part II (Chapter 4-7) addresses mostly the circuit perspective of digital circuit design, while Part III (Chapter 8-12) presents a more system oriented vision. Part I (Chapter 1-4) provides the necessary foundation (design metrics, the manufacturing process, device and interconnect models).


Digital IC Analysis & Design (in english)(40260173), Key Subject Course

Instructor: Liu Leibo

This course starts from a model of the semiconductor devices and gradually processes upwards, covering the inverter, the complex logic (NAND, NOR, XOR), the functional (adder, multiplier, shifter, register) and the system module (datapath, controller, memory) levels of abstraction. For each of these layers, the dominant design parameters are identified and simplified models are constructed, abstracting away the nonessential details. This course is divided into two major parts: Part II (Chapter 4-7) addresses mostly the circuit perspective of digital circuit design, while Part III (Chapter 8-12) presents a more system oriented vision. Part I (Chapter 1-4) provides the necessary foundation (design metrics, the manufacturing process, device and interconnect models).


Microelectronics process technology (30260072), Key Subject Course

Instructor: Yue Ruifeng

This course will provide an overview of the various unit processes in microelectronics fabrication, as well as process integration of CMOS processes. We will start with unit processes including oxidation, and doping technologies including diffusion, ion implantation and rapid thermal processing. We will then discuss thin film deposition of various materials using chemical vapor deposition and physics vapor deposition, as well as photolithography and wet/dry etching techniques for these layers. The contents of every chapter include the basic physics concepts, process methods, quality control issues and the future trends. Then we will also discuss in detail process integration issues for sub-micron CMOS IC. We will offer computer experiments chance, then students can study the process simulation and operation methods of oxidation, diffusion and implant process.


Semiconductor physics and devices(40260053)

Instructor: Deng Ning and Tian Lilin

As one of the basic course of microelectronics, ‘Semiconductor physics and devices' focuses on basic physics and operation principles of semiconductor devices, as well as the latest developments on modern semiconductor devices. Following contents are included: energy states of electrons in semiconductor, carrier statistics, carrier transport (non-equilibrium carriers, generation and recombination, drift and diffusion, continuity equations), PN junction diode and bipolar junction transistor, MOSFET, semiconductor memory, optoelectronic devices, power devices, basic physics of nano-electronic devices.

Students could learn basic knowledge on semiconductor devices and the evolution of semiconductor technology. And the ability of analyzing the operation mechanism of devices and developing new devices can be promoted. In addition, this course is necessary for further studying on IC design.


Analog IC Analysis and Design (40260033), Key Subject Course

Instructor: Wang Ziqiang

The course emphasizes on the integrated operational amplifiers and will discuss the analysis and design technique of the basic analog integrated circuit blocks (including single-stage amplifiers, differential amplifiers, output stage, current mirrors, reference sources, operational amplifers, comparator and switched-capacitor circuits). The students will be trained to have the basic ability of the analysis and design of the analog integrated circuit.


Introduction to the Course of Micro&Nano Electronics Experiment(40260022)

Instructor: Gao Lili

The micro&nano electronics experiments include: semiconductor physics and device, integrated circuit, simulation of integrated circuit process, simulation of device, parameter extraction of Spice models and experiments of Nanoelectronics, etc. By the training of these experiments, we hope that the students can get a practical understand of micro&nano electronics, cultivate their both abilities in experimentation and in analyzing as well as solving practical problems, so that they are more likely to be adapt to work playing significant roles in the spheres of industry and research.


Micro&Nano Electronics Experiment A (40260141) ,Key Subject Course

Instructor: Gao Lili

1.Digital integrated circuit test, including tests of function, highest working frequency and various DC parameters.

2. TCAD (Technology CAD), including simulation of integrated circuit process, simulation of device and parameter extraction of Spice models, etc.

3. Measure the three class I-V characters of MOSFET to gain: threshold voltage (VT)、body-effect coefficient(γ)、subthreshold slope、mobility of carriers in inverse layer.


Micro&Nano Electronics Experiment B (40260151), Key Subject Course

Instructor: Gao Lili

Experiment Specification:

1. Measure MOS high frequency C-V character (compute fixed and mobile charge in silicon dioxide).

2. Experiments of quantum Hall effect, conductance quantization and coulomb blockade of single-electron device.


Electronics of Microelectronic Devices (30260063), General Course

Instructor: Zhang Li and Xu Jun

Introduce fundamentals of diode, BJT, MOSFET, JFET and other semiconductor devices, including DC characteristic, small signal characteristics, transient characteristics and small size effect of devices. Common used device models and parameter extraction are also introduced.


Electronics of Microelectronic Devices (in English)(30260083), General Course

Instructor: Xu Jun

Introduce to the fundamentals of semiconductor materials, integration process and the devices. Highlight on PN junction diode, BJT, MOSFET, JFET and other semiconductor devices, including device structure, fabrication and its physical principle.


An introductory to quantum information science (40260012), Elective Subject Course

Instructor: Chen Wei

Quantum information process is a new field of research that applying quantum mechanism fundamentals to perform information storage, communication and processing. This course will introduce main concepts and methods of quantum information science and review required backgrounds of physics, mathematics and computer science, and common used tools. And will discuss the new development of the field.


Introduction of Nanoelectronics (40260112), Optional compulsory Course

Instructor: Ren Tian-Ling

This is an undergraduate course. By taking this course one will learn basic concept, principle and method used in nanoelectronics and the forefront of development of microelectronics towards nanoelectronics. Main topic covered including nanometer CMOS technology, resonant tunneling phenomena and device, single electron device, carbon nanotube electronics, spin electronics, superconducting electronics, molecular electronics, NEMS, quantum information process etc.


CAD of VLSI (40260043), Elective Subject Course

Instructor: Zhang Wenjun

Basic concepts in VLSI CAD. Various fundamental algorithms and methodologies used in VLSI CAD. Technology and challenges facing the industry today and in the next ten years.


Introduction to Microsystems and MEMS (30260032), Elective Subject Course

Instructor: Wang Zheyao

Microsystems (or microelectromechanical systems, MEMS) is a cutting-edge filed focusing on science and technology for miniaturization, which is implemented by fabricating integrated systems with sizes ranging from a few microns to a few millimeters.

This field is involved with things on a smaller scale and encompassses all aspects of science and technology, such as physics, chemistry, electronics, biology, mechanics, etc.

This course is designed as an introduction to the fundamentals of theories and microfabrication technology, as well as their applications to the MEMS field. Various aspects of MEMS technology and its numerous applications are presented, including fundamental mechanics and physics, design methodology, microsensors, microactuators, RF MEMS, Optical MEMS, Bio MEMS, microfluidics and Lab on a chip, Power MEMS, etc. The miniaturization, multidisciplinary, and microelectronics characteristics of MEMS technology make it especially attractive to realize small-size, low-cost, high-performance systems integrated on one chip.


Course design of integrated circuits (40260063), Elective Subject Course

Instructor: Li Fule

Introduction to CMOS process flow. Fabrication sequence and device structures in typical CMOS processes. Knowledge of Full-custom design flow. Design input and spice simulation. Layout edit and verification. Layout parameter extraction and post simulation. Knowledge of cell-based design flow. Verilog HDL and coding for synthesis. Simulation, synthesis and P&R. Cell-based verification. The course project of designing a 10-bit cyclic analog-to-digital converter.


Introduction of Microelectronics(40260072) , Elective Subject Course

Instructor: Yan Li-ren

This course is an introduction of microelectronics towards all science and engineering students in Tsinghua University who are interested in microelectronics, semiconductor and integrated circuits. Microelectronics is one of the most important fields in modern science and technology, especially in information technology. This course will present the basic knowledge, including the semiconductor physics, the principles of transistors, MOS circuits, fabrication of integrated circuit (IC), IC design and MEMS (Micro Electro Mechanical System), and introduce the recent development and future trend of microelectronics.


Professional English in Microelectronics(40260082) , Elective Subject Course

Instructor: Yin Shouyi

“Professional English in Microelectronics” is intended as a selective course for senior students who major in microelectronics. The purpose of this course is to provide the students with a foundation of reading original English professional textbooks and research papers in solid-state devices and microelectronics.


Semiconductor sensors (40260092), Elective Subject Course

Instructor: Wu Xiaoming

By taking this course one will learn the basic principles and design techniques for various integrated sensors. Contents covered include materials, design principle, integration methods, signal process and circuits used in sensors and basic structures of intelligent and networked sensors. Will study mechanical sensors such as pressure and acceleration, as well as magnetic, acoustic, temperature, humidity, and gaseous and ionic and biology sensors. Emphasis is on the design principle and integration methods of various sensors. Student will learn the fabrication method and application of modern sensors.


Technologies for micro/nano electronics materials analysis (40260162)

Instructor: Xie Dan

Analytical technique in micro/nanoelectronic material and devices Micro and nanoelectronic technology utilizes different new materials, device structures and related process techniques. One has to use various analytical equipment to evaluate properties of materials and devices, such as STM, AFM and MFM. This course will introduce various analytical methods used in microelectronics and nanoelectronics, such as crystal structure analysis (XRD etc.), surface topology analysis (SEM, TEM, and AFM etc.),composition analysis (AES, XPS, and SIMS etc.), and will discuss the application of above methods in micro/nanoelectronic devices. And will introduce some new type of analytical methods for micro/nanoelectronics.


Micro device and system & microminiaturized method (00260021)

Instructor: Liu Litian

The micro miniaturization is one of the most important development aspects of modern science and technology all the while. The micro miniaturization of devices and systems is the most outstanding feature in informational and mechanoelectronic field. This curriculum enters into the actuality and the development of microminiaturization of information devices and systems, as well as the profound transformation led by them. The microminiaturization technology deals with overlapping disciplines, involving microelectronics, solid-state electronics, photoelectronics, physics, mechanics and material science. The curriculum also touches upon the unsolved theory and the methodology in this overlapping field. The curriculum as well as discusses the existing micro miniaturization technology (the design technology and the manufacture technology of devices and systems).



The Invention of Transistors and the Birth of Information Age( 00260011)

Instructor: Wang Zhihua

The invention of transistor is the most important advancement in the 20th century. The transistors and the integrated circuits with the transistors as its kernel are the base of information world. There is no comparison between this achievement and other progress in technologies. The invention of transistor root in the mature of physics, electronics, and other related sciences and technologies in 19 and 20 centuries. Many notability of physical scientist and engineers were bring up by the invention. John Fleming, Lee de Forest , William Shockley, John Bardeen, Walter Brattain are models of them. It was also the invention of transistor to bring the naissance of a lot of famous corporations and organizations, such as Bell Lab. Fairchild semiconductor and Intel.

To grasp the opportunity in today's progress of science and technologies, we need to understand the history. As one of the most important event history of science and technology, there had a lot of experience and tora on the inside of the invention of transistor. It deals with the administer, talent scout, methodology, and, can be the reference of today's research and development. This course covers the history from the invention of transistor to the birth of information age, to investigate the principium of technology and innovation. It is suitable for the freshman and junior students to understand the world view for their future research. The topics discussed in this course including, the significance of the forecast and subject selection of the research, the importance of the methodology and policy during the research, ability to appreciate a person's character and ability and, the topics discussed in this course included but not limited the importance of presentiment and the selection of research aspect, the methodologies and policy of research and development as well as the ability to appreciate a person's character and ability.

Reference books:

Michael Riordan, Lillian Hoddeson, Crystal Fire: The invention of the transistor and the birth of the information age, Norton Paperback, 1998

T.R. Reid, The Chip: How Two Americans Invented the Microchip and Launched a Revolution, Random House Inc., 2001

Leslie Berlin, The Man Behind the Microchip: Robert Noyce and the Invention of Silicon Valley, Oxford University Press, 2005