Micro/Nano Devices and Systems Research Division
 
1. Introduction           
       The research areas in the division of micro/nano devices and systems are new types of micro/nano devices and systems consisting of these devices. The research scope includes new devices and systems, new techniques and technologies, new materials and architectures, new concepts and principles. Research projects carried out in the division include MEMS and micro transducers; Micro -fluidic devices, medical sensors and systems; nanoelectronic and quantum devices; new non-volatile memories; system level packaging and integration technology. 
This division is an important member of Tsinghua micro/nanotechnology research center. It has clean room facility and many micro-fabrication equipments, including double sided optical aligner, inductive coupling plasma etcher, vacuum bonding machine, electroplating and etching equipments, MOCVD, LPCVD, ultra high vacuum multi-targets sputtering system, ion beam etcher, CMP and many characterization apparatus, such as SEM, SPM and Profiler etc., capable of carrying out research work on various micro and nano materials, structures and circuits. 
There are 21 faculty members in the division,including 8 professors, 9 associate professors and 4 lecturers. Among them there is one fellow of Chinese academy of sciences, one Changjiang scholar, and two holders of outstanding young researcher award from Chinese national science foundation. There have been 130 graduate students who graduated with masters or Ph.D degrees from the division and published over 400 journal and conference papers in the last ten years. From 1999-2009 27 theses were selected“100 best Ph.D theses” in electrical science and technology all over the country and among them 3 were written by students from this division.
The research division has funding support from national high-tech development research project (863)、National Basic research project (973) and key projects of Chinese Natural Science Foundation (NSF) in recent years.
 
2. Research Interests:
(a) (MEMS/NEMS)
[1]    Integrated micro/nano transducers: pressure, acceleration, biological, un-cooled IR focal plane detector, magneto resistance transducers.
[2]   RF MEMSMicro mechanical switches, filters, inductors, phase shifters.
[3]   Micro acoustic devices: silicon mini-microphone, mini-speakers, supersonic devices.
[4]   Optical devices: mini mechanical-optical switch, filters, piezoelectric actuators.
[5]   Energy devices: mini fuel cells, mini 3d super-capacitors, mini energy harvesters.
[6]   Micro/nanofabrication technology: micro-fabrication on surface and in bulk materials, dry and wet etching technology, double side optical lithography, thick resist lithography, bonding, electroplating etc.
(b) micro fluidic and BioMEMS
[1]   Micro fluidic devices: micro channels, micro pumps, micro valves.
[2]   Micro fluidic chip and electrical controlled micro fluidic systems.
[3]   Micro total analysis system(uTAS) and micro biological analysis machine
[4]   Integrated diagnostic chips for major disease and cancers
(c) Nanoelectronics and quantum devices
[1]   Nanoelectronic devices: low dimensional electronic materials, structures and devices.
[2]   Quantum devices: silicon based quantum devices, molecular devices, and spin devices
[3]   Quantum computation: quantum computation and quantum information process
[4]   Magnetoelectric and spin devices
(d) New types of memory devices
[1]   FeRAM
[2]   MRAM
[3]   RRAM
[4]   PRAM
(e) System level packaging and integration technology
[1]   Key technology for system level packaging
[2]   Packaging technology for integrated circuit and electronic devices.
[3]   Packaging technology for MEMS
[4]   3D packaging technology
[5]   Reliability issues in packaging technology
 
3. Research Facilities
This division is an important member of Tsinghua micro/nanotechnology research center. It has a clean room facility and many micro-fabrication equipments, including double side optical aligner, inductive coupling plasma etcher, vacuum bonding, electroplating and etching, MOCVD, LPCVD multi-targets ultra high vacuum sputtering system, ion beam etcher,CMP and characterization apparatus, such as SEM, SPM and Profiler etc. And there are also dedicated equipments for research on ferroelectric or piezoelectric devices, and superconducting quantum devices.
   E-beam evaporation thin Film Deposition System.  Kelvinox MX400 Dilution Refrigerator.
 
 
LPCVD                      Multi targets sputter machine
 
            ICP                    MA-6 contact aligner 
 
4. Human Resources
There are 15 full time employees, including 7 professors, 6 associate professors and 1 lecturers. Among them there is  two Changjiang scholar, and two holders of outstanding young researcher award from Chinese national science foundation. There are 53 graduate students enrolled right now, of them 31 Ph.D students and 22 master students. There have been 130 graduate students graduated with masters or Ph.D degrees in the last ten years and published over 400 journal and conference papers. There have been 27 theses selected“100 best Ph.D theses” in electrical science and technology from 1999-2009 all over the country and among them 3 are written by students from this division.
Division manager: 
Prof. Wei Chen:Tel:62789151-311, Fax: 62772608, Email: weichen@tsinghua.edu.cn
Associate manager:
Prof. Z. Wang:Tel:62789151-322, Fax: 62771130, Email: z.wang @tsinghua.edu.cn
Faculty members and their research interests:
 

 

 

 
       
 
       
 
  
 The assembled μDMFC               Polysilicon membraneμDMFC
 
     
Un-cooled IR detector and array    GMR magnetic field sensor
 
  
            Silicon micro-needle arrays             Electro-wetting variable-focus liquid lens
 
       
 SMD packages for micro acoustic devices    Solder bump array 、CZT detector、Au bumps Flip chip
                   
Tire pressure monitoring sensor and system                          ReRAM
                
RF MEMS switch                     IR detector based on Ge QDs
 
           
  Piezoresistive microcantilever biosensor     Ultra- sensitive silicon nanowire biosensor

 

 

 

 

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