The objective of IMETU is to develop a complete MOS-based microelectronic research system. Two major research directions are Micro/Nanoelectronics and IC circuits and systems ,which are trends in microelectronic science and technology.

Combining the establishment and development of subject and laboratory, five objectives have been defined:

 Micro/Nanoelectronic Devices and systems

 Integrated Circuits and Systems

 Integrated Circuits Processing Technology and Nanofabrication Technology

 Semiconductor Device Physics and CAD

 Nanoelectronics and Technology for Information Processing


Micro-Nanoelectronic Devices and Systems

Researches are emphasized on various new micro-nanoelectronic devices and systems including non-volatile memory, Micro-Electro-Mechanical Systems (MEMS), micro-nanoelectronic device and system on biological, chemical and medical applications, new materials, packaging techniques as well as electronics.


Integrated Circuits and Systems

Existing Electronic System Integration and ASIC Technology Research Center , was developed into SOC Research Center . Researches are emphasized on digital, analog, RF mixed-signal IC designs and important IP development, SOC testing method, information security on wireless communication SOCs.


Integrated Circuits Processing Technology and Nanofabrication Technology

Further improve existing research-manufacture processing line. Follow up the trend of CMOS technology development on device structure, cell circuit, new material and processing, special SOC processing technology. Research on SiGe used for RF, non-volatile memory, high-voltage/low-power device and other new devices and processing technologies.Combine academic researches with industry applications.


Semiconductor Device Physics and CAD

Establish “Virtual Micro-Nanoelectronic Technology Research Center ”. Research on small-size MOSFET devices transport mechanism , nanometer quantum , device structure and theory analysis, new structure on micro-nanoelectronics and related CAD development, library method and embedded memory IP, RF layout, circuit extraction and verification, etc.


Nanoelectronics and Technology for Information Processing

Research in physics, realization, and potential applications of nano-scale structures with low-dimensionality. The focus is in integratable nanoelectronic devices which are compatible to the silicon-based CMOS process, including GeSi quantum array, the physical mechanism for contacts between metals and molecular/biological materials. Research in the solid-state realization of quantum bits (qubits), including the fabrication of multi-qubits using superconducting devices and their measurement techniques. Computer simulation of nanoelectronic devices and quantum-structures.



R&D Facilities and Capabilities


 Setting up Platform for IC Process Technology and Development

A 1-1.5m level VLSI Pilot Line was first established in IMETU in 1989 in China . There are about 1000 square meters clean rooms with different class of cleanness in it. Supported by national special construction funds, the line has been upgraded to 0.6~0.8m feature size VLSI Pilot Line. Cooperating with IBM Co. and Motorola Co., the Pilot Line is equipped with a complete set of sub-micron VLSI processing equipments. It has passed ISO9001 recognition of production quality. The output production capacity has reached more than 4500 wafers per month in 2004. The processing line has passed ISO9001 recognition of production quality and started to provide foundry service for industry. The pilot foundry also developed EEPROM、 FLASH、 high voltage 、 low power and SiGe new technology. This Pilot Line is open for nationwide use and serves as ‘the Multi-project Wafer Supporting Center' (MPW). Through introducing and digesting advanced IC technology from abroad, new technology and products for market will be studied and developed here. The Pilot Line is a platform for R&D and transformation of scientific achievements to universities, institutes and companies all over the country. It is a base to educate engineers and scientists in the IC technology field.


 Microelectronics Engineering Center

In December 2004, VLSI Pilot Line cooperated with China Electronics Corporation and invested 9.5M USD to establish the Microelectronics Engineering Center, which aims at the advanced research, fabrication and service of microwave SiGe HBT, SiGe ICs, special application ICs and non-volatile semiconductor memory ICs. Based on micro-electronics institute integrated circuit development and pilot line, the engineering center with investment 78 millions will conduct special silicon IC 、 SiGe HBT development and accomplish batch production.


  Electronic System Integration and IC Design Environment

The Electronic System Integration and ASIC Technology Research Center of Tsinghua University is one of the three research platforms of the IMETU. Based on Microelectronics Institute, the center was established and put into operation in 1997, passed certification in Oct. 1999. With IMETU as its research base, the group has floor space of 1100 square meters. It offers complete and advanced multilevel hardware and software environment for design, simulation and validation of processing and IC design. It is equipped with more than 50 workstations and 100 packages of front/back-end advanced IC design software. This is an open center to support research on electronic systems, design of ASIC system integration, developing joint research projects. It is also an education base for high quality scientists and engineers and a base for developing ASIC and EDA software.


Main Mumber of Micro-Nanoelectronic Processing Technology Research Center of Tsinghua Univ.

A research and fabrication center of Micro/Nano technology has been set up at IMETU with funding from Ministry of Education, 211 Grant. It is a base for design, fabrication and testing of Micro/Nano technology, which is the first one established in China. With its 1μm IC processing line and a set of three-dimensional silicon micron mechanical equipments, it can provide perfect lab services for research and fabrication of MEMS chips. High-level MEMS devices and technology have been developed in the lab. Many excellent papers have been published in academic journals both in China and internationally. A biochip research and fabrication base has been established at IMETU.


 Electronic Packaging Technology Research Center

To meet the demands of microelectronic industry, the research center was set up at the beginning of 2004. It will drive the development of relevant disciplines in our school, as well as become the experimental base for scientific research. The research center will launch the research with internationally advanced level in the design, process, material, reliability, fault analysis, stack-chip technology, system level packaging, MEMS packaging, high performance device and system packaging, etc.